F00700 - SEMI F7 - フロロカーボン製チューブフィッティング接合部の引張り強さを測定するテスト方法 StdTpc-Package Specifications originally published March 2004

originally published March 2004

4-1022 (Reapproved 0225)

This Standard applies to compact size mass flow controllers and mass flow meters

本安全ガイドラインには以下の項が含まれる。

SEMI MF397-1106 (Reapproved 1111)

F00700 - SEMI F7 - フロロカーボン製チューブフィッティング接合部の引張り強さを測定するテスト方法 StdTpc-Package Specifications originally published March 2004Facilities CommitteeNorth American Facilities Committee199810North American Regional Standards Committee19992SEMI On Line199921992 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. SIU. S. Referenced SEMI Standards None.